Другое лабораторное оборудование DIENER Tetra 30

Preis: Contact us for price
Marke: DIENER
Manufacturer: DIENER Electronic GmbH + Co. KG PLASMACLEANER
Type designation: TRETRA 30
Still in operation: No
Operating manual available: Yes
CE declaration available: Yes
Data sheet: N/A
Service reports available: N/A
Where the machine is located: Factory hall
Can it be inspected: Yes
Ev.accessories: N/A
Tetra 30
Low pressure plasma systems
Low pressure plasma systems
for plasma cleaning
activation
etching and coating
Dimensions housing (19" rack)
(with connections)
width approx. 600 mm
height approx. 1700 mm
depth approx. 800 mm
Weight approx. 250 kg (without pump)
Vacuum chambers
Stainless steel or aluminum
Rectangular
door with hinge
width approx. 305 mm
Height approx. 300 mm
Depth approx. 370 or 625 mm
Chamber volume
Approx. 34 l - 57 l
Gas supply
Mass Flow Controller (MFC)
Generator Frequencies
80 kHz Power 1000 W or 3000 W
13.56 MHz Power 0 - 300 W
0 - 600 W
2.45 GHz Power 0 - 600 W
0 - 1200 W
All generators are continuously variable
from 0 - 100
Electrodes
Single or multiple electrodes
RIE electrode with gas shower
Control hardware
PCCE control (Microsoft Windows CE)
PC control (Microsoft Windows 10 IoT)
Pressure measurement
Pirani
Capacitance manometer (for corrosive gas version)
Power supply
230 or 400 V / 3 phases
Vacuum pump
In different sizes and from different
manufacturers (with activated carbon filter if required)
Low pressure plasma systems
Low pressure plasma systems
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